Varian Vacuum System




Vacuum systems are used in a wide variety of nano fabrication and characterization processes.


SEM's, sputter coaters, and thermal evaporators all use vacuum systems.



  • Details

Manufacturer: Varian

Model: Turbo Mini Turbo V-70 Mini Pumping Station

Instrument Type: Thermal Vacuum Deposition System

Description: High vacuum turbo molecular pump pumping system capable of applications such as high vacuum research, sample preparation, and thin film deposition.

Key Features: Thermal evaporation and deposition, high vacuum bell jar chamber, 40-280 L/sec pumping capacity.

Materials Restrictions: Sample must be dry, and low outgassing substrates, and be stable under mechanical vacuum.

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